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Metasurface is an advanced flat optical component that can flexibly manipulate the electromagnetic wave in an ultrathin dimension. However, electromagnetic coupling among neighbored optical elements decreases the diffractive efficiency and increases the noise. In this paper, a novel computational method is proposed to optimize the coupling of the metasurface. The coupled electric fields in metasurface design are decomposed into various coupling orders and then restructured to replace the whole metasurface simulation. This method is applied to optimize a metasurface that consisted of conventional nanorod plasmonic antennas as a case study. The convergence of this method in calculation is demonstrated. The electric field intensity deviation of a nanoantenna array can be reduced from 112.2% to 0.5% by the second-order coupling correction. The diffractive efficiency of a three-level phase meta-deflector is optimized from 73% to 86% by optimized coupling compensation via particle swarm optimization (PSO). This process opens a new area of metasurface design by the detailed field distribution of optical elements.

Diffractive Efficiency Optimization in Metasurface Design via Electromagnetic Coupling Compensation