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The accurate analysis of periodic surface acoustic wave (SAW) structures by combined finite element method and boundary element method (FEM/BEM) is important for SAW design, especially in the extraction of couple-of-mode (COM) parameters. However, the time cost is very large. With the aim to accelerate the calculation of SAW FEM/BEM analysis, some optimization algorithms for the FEM and BEM calculation have been reported, while the optimization for the solution to the final FEM/BEM equations which is also with a large amount of calculation is hardly reported. In this paper, it was observed that the coefficient matrix of the final FEM/BEM equations for the periodic SAW structures was similar to a Toeplitz matrix. A fast algorithm based on the Trench recursive algorithm for the Toeplitz matrix inversion was proposed to speed up the solution of the final FEM/BEM equations. The result showed that both the time and memory cost of FEM/BEM was reduced furtherly.

A Fast Optimization Algorithm of FEM/BEM Simulation for Periodic Surface Acoustic Wave Structures