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The nonlinearities of piezoelectric actuators and external disturbances of the piezoelectric nanopositioning stage impose great, undesirable influences on the positioning accuracy of nanopositioning stage systems. This paper considers nonlinearities and external disturbances as a lumped disturbance and designs a composite control strategy for the piezoelectric nanopositioning stage to realize ultra-high precision motion control. The proposed strategy contains a composite disturbance observer and a continuous terminal sliding mode controller. The composite disturbance observer can estimate both periodic and aperiodic disturbances so that the composite control strategy can deal with the disturbances with high accuracy. Meanwhile, the continuous terminal sliding mode control is employed to eliminate the chattering phenomenon and speed up the convergence rate. The simulation and experiment results show that the composite control strategy achieves accurate estimation of different forms of disturbances and excellent tracking performance.

Design of Composite Disturbance Observer and Continuous Terminal Sliding Mode Control for Piezoelectric Nanopositioning Stage