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Comb-drive micromirrors are becoming of interest for a broad range of light\udmanipulation applications. Due to technical reasons, some of these applications require\udpackaging of the micromirror’s optical module in ambient air. Furthermore, micromirrors\udfor picoprojectors application are required to function at high frequencies in order to\udachieve high resolution images. Accordingly, a study of the energy dissipated due to the\udinteraction between the moving parts of the micromirror and the surrounding air, leading to\udfluid damping, is an important issue. Even if air damping has been thoroughly studied, an\udextension to large air domain distortion linked to large tilting angles of torsional\udmicromirrors is still partially missing. In such situations, the flow formation turns out to be\udfar more complex than that assumed in analytical models. This task is here accomplished\udby adopting three-dimensional computational fluid dynamics models; specifically, two\udmodels, holding at different length scales, are adopted to attack the problem through an\udautomated dynamic remeshing method. The time evolution of the torque required to\udcompensate for the fluid damping term is computed for a-specific micromirror geometry

Modeling of Fluid Damping in Resonant Micromirrors with Out-of-Plane Comb-Drive Actuation