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In this work, we present an Opto-Electro-Mechanical Modulator (OEMM) forRF-to-optical transduction realized via an ultra-coherent nanomembraneresonator capacitively coupled to an rf injection circuit made of amicrofabricated read-out able to improve the electro-optomechanicalinteraction. This device configuration can be embedded in a Fabry-Perot cavityfor electromagnetic cooling of the LC circuit in a dilution refrigeratorexploiting the opto-electro-mechanical interaction. To this aim, an opticallymeasured steady-state frequency shift of 380 Hz was seen with a polarizationvoltage of 30 V and a $Q$-factor of the assembled device above $10^6$ at roomtemperature. The rf-sputtered titanium nitride layer can be madesuperconductive to develop efficient quantum~transducers.

Low Noise Opto-Electro-Mechanical Modulator for RF-to-Optical Transduction in Quantum Communications