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In this work, lateral-field-excitation (LFE) piezoelectric sensors based on polarity inversion layer are designed and fabricated, then frequency stabilities and sensitivities on electric property changes of liquids are tested. Because the polarity inversion layer can suppress the spurious modes, the stabilities of the LFE devices with a polarity inversion layer are obviously better than that of LFE devices with no polarity inversion layer. On the changes of liquid conductivity and permittivity, the sensitivities of the LFE devices with a polarity inversion layer are 2.4 times and 2.1 times higher than that of LFE devices with no polarity inversion layer, respectively. The polarity inversion layer of the lithium niobate crystal plate can be realized conveniently by heat treatment, therefore, the technology of the polarity inversion layer can play an important role in improving the sensing performances of LFE sensors.

Effects of Polarity Inversion Layer on Performances of Lateral-Field-Excitation Piezoelectric Sensors Based on Lithium Niobate Single Crystal