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We proposed a method to study the effects of azimuth and the incident angle on the accuracy and stability of rotating polarizer analyzer ellipsometer (RPAE) with bulk Au. The dielectric function was obtained at various incident angles in a range of 55°–80° and analyzed with the spectrum of the principal angle. The initial orientations of rotating polarizing elements were deviated by a series of angles to act as the azimuthal errors in various modes. The spectroscopic measurements were performed in a wavelength range of 300–800 nm with an interval of 10 nm. The repeatedly-measured ellipsometric parameters and determined dielectric constants were recorded monochromatically at wavelengths of 350, 550, and 750 nm. The mean absolute relative error was employed to evaluate quantitatively the performance of instrument. Apart from the RPAE, the experimental error analysis implemented in this work is also applicable to other rotating element ellipsometers.

Method for Analyzing the Measurement Error with Respect to Azimuth and Incident Angle for the Rotating Polarizer Analyzer Ellipsometer