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This work focuses on the development of nanoparticle-based layer-by-layer (LbL) coatings for enhancing the detection sensitivity and selectivity of volatile organic compounds (VOCs) using on-chip mid-infrared (MIR) waveguides (WGs). First, we demonstrate construction of conformal coatings of polymer/mesoporous silica nanoparticles (MSNs) on the surface of Si-based WGs using the LbL technique and evaluate the coating deposition conditions, such as pH and substrate withdrawal speed, on the thickness and homogeneity of the assemblies. We then use the modified WGs to achieve enhanced sensitivity and selectivity of polar organic compounds, such as ethanol, versus non-polar ones, such as methane, in the MIR region. In addition, using density functional theory calculations, we show that such an improvement in sensing performance is achieved due to preferential adsorption of ethanol molecules within MSNs in the vicinity of the WG evanescent field.

Surface Functionalization Utilizing Mesoporous Silica Nanoparticles for Enhanced Evanescent-Field Mid-Infrared Waveguide Gas Sensing