English (United Kingdom)

https://curated-unify.zendy.io/wp-json/zendy-region/v1/featured_content/oa?rat=en

https://curated-unify.zendy.io/wp-json/zendy-region/v1/highlighted_journal/

Global: Zendy Plus annual

Presents the access of premium content as premium feature

Premium Content

Presents the keyphrase highlighting as premium feature

Keyphrase Highlighting

Presents the summarisation as premium feature

Summarisation

Insights

Presents the pdf analysis as premium feature

PDF Analysis

Presents the zaia usage as premium feature

ZAIA

Global: Zendy Plus monthly

Global: Zendy Tools annual

Global: Zendy Tools monthly

Global: Zendy Free Plan

The design of a multi-position drum-type assembly (MPDTA) for heating and positioning substrates with the possibility of individually setting and controlling the temperature of each substrate, which is applicable for laboratory-type sputtering setups, is described. The above design provides the possibility of the simultaneous deposition of thin films under identical conditions on several substrates at different temperatures, making it possible to explore the temperature dependences of the films’ morphology, structure, and functional characteristics in one single vacuum deposition cycle. As a case study, the possibility of investigating such dependencies for the magnetron deposition of transparent conducting indium–tin oxide (ITO) thin films was demonstrated using the MPDTA. The investigation results revealed that the functional performances of deposited ITO thin films (resistivity and average transmittance in the visible range) improved with increasing the substrate temperature, reaching values of 1.5 × 10−4 Ω·cm and over 80%, respectively, at 300 °C.

A Multi-Position Drum-Type Assembly for Simultaneous Film Deposition at Different Temperatures in a Single Sputter Cycle–Application to ITO Thin Films