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Cr–Si–N nanocomposite coatings were deposited by multi-arc ion plating under different bias voltages. The influences of bias voltage on composition, microstructure, surface morphology and mechanical properties of Cr–Si–N nanocomposite coatings were investigated in detail. The HR-TEM, XRD, and XPS results confirmed the formation of nanocomposite structure of nanocrystalline of CrN embedded into the amorphous phase of Si3N4. The particle radius of CrN can be calculated from the half-width of the diffraction peak of CrN (200) and the value was about 20–60 nm. In addition, no diffraction peaks of CrSi2, Cr3Si, or Si3N4 were found in all the Cr–Si–N coatings. With the increasing of bias voltages from 0 to −200 V, the number and size of large droplets on the coating surface decreased, and the growth mode of the coatings changed from loose to dense. However, with the increasing of bias voltages from 0 to −200 V, the micro-hardness of the coatings increased and then decreased, reaching its maximum value at negative bias voltages of 100 V. It was found that the friction coefficient of Cr–Si–N coatings is almost the same except for the Cr–Si–N coatings deposited under bias voltage of 0 V. When the oxidation temperature was at 800 °C, the Cr–Si–N coating was only partially oxidized. However, with the increase of oxidation temperature to 1200 °C, the surface of the coating was completely covered by the oxide generated. The results showed that the bias voltages used in multi-arc ion plating had effects on the structure, mechanical, and high temperature oxidation resistance properties of Cr–Si–N nanocomposite coatings.

Effects of Bias Voltages on the Structural, Mechanical and Oxidation Resistance Properties of Cr–Si–N Nanocomposite Coatings