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The objective of this study is the investigation of dielectric barrier discharges (DBDs) with the solid plates and the flexible polymer films. A high capacitance with a high dielectric constant and a small thickness is responsible for the discharge of a high plasma current with a low operation voltage; here, the thin flexible polyimide film ensured a high capacitance, and is comparable to the thick solid-plate alumina. In the long-duration test of the dielectric-surface plasma erosion, the solid plates show a high resistance against the plasma erosions, while the polymer films are vulnerable to the etching by the plasma-species chemical reaction. The polymer-film surface, however, was reinforced remarkably against the plasma erosion by the silicone-paste coating.

Discharge Characteristics and Plasma Erosion of Various Dielectric Materials in the Dielectric Barrier Discharges