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While curved surface microstructures have wide applications in optical components and devices, how to achieve high machining accuracy of the microstructures is crucial for their applications. In the present work, we fabricate sinusoidal modulation microstructures on a curved copper surface by ultra-precision diamond cutting, with the combination of a rotary B-axis and a fast tool servo system. Specifically, tool path planning, together with the consideration of a curved, sinusoidal surface meshing and tool tip arc segmentation compensation, is carried out. Preliminary cutting experiments are firstly carried out on a homemade four-axis ultra-precision lathe, which demonstrates the advantages of additionally applying the rotary B-axis in suppressing burr formations and over-cutting phenomenon over the sole utilization of the fast tool servo system. Subsequent experiments are carried out to evaluate the effects of feed rate and the number of sampling points on the machining accuracy of the microstructures under the combination of a rotary B-axis and a fast tool servo system. With the optimized machining parameters, sinusoidal modulation microstructures, which have a wavelength of 700.6 μm, a peak-to-valley of 18.7 μm, a surface roughness of 18.9 nm and a deviation of profile tolerance of 4.326 μm, are successfully fabricated on a curved copper surface with a face radius of 10 mm and a curvature radius of 500 mm.

Fabrication of Sinusoidal Microstructures on Curved Copper Surface by Ultra-Precision Diamond Cutting with a Rotary B-Axis and Fast Tool Servo System