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Slide stability is key to the aerostatic guide in ultra-precise machines; thus, it has garnered plenty of attention. Macro-scale studies are commonplace, but micro- and nano-vibration issues require more attention. Microscope vibration is mainly caused by tiny changes in the fluid parameters of lubricating gas film, which is complex and has no verdict. In this case, slide-gas interaction should be considered. In this study, the widely used orifice-type restrictor was investigated for its nano-vibration performance. A Comsol finite-element-method fluid–structure interaction model was used to simulate and analyze an orifice-type restrictor, and orifice-restrictor vibration characteristics at the nanometer scale were inspected using a high-performance laser vibrometer. The results demonstrate that see-saw mode vibrations occur in the restrictors, growing stronger with increased air-supply pressure. The see-saw vibration’s axis is speculatively determined based on orifice and restrictor structures, and the vibration type is related to the number of orifices. The results also show that the vibration is random with natural frequencies at the kilohertz level. The newly provided research results are beneficial for better understanding the nano-vibrations of orifice-type restrictors.

Experimental Study of See-Saw Mode Nano-Vibration on Orifice-Type Restrictors