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A micro-device vibration measurement method based on microscopic speckle interferometry combined with orthogonal phase is presented. This method utilizes the approximate linear distribution characteristics of orthogonal points (points satisfying the condition that the initial phase difference equal to π/2) to quickly obtain the vibration information of the measured object. Compared with common optical measurement methods, this method does not require scanning imaging and can realize real-time full-field measurement. Moreover, the measurement principle and equipment is simple, so there is no need to introduce a stroboscopic light source or heterodyne device.

Micro Vibration Measurement with Microscopic Speckle Interferometry Based on Orthogonal Phase