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We present an aided optical alignment method using the liquid crystal on silicon spatial light modulator (LCoS-SLM). An optical system composed of an interferometer and an LCoS-SLM was established to verify the effectiveness of the method. The system was also calibrated to solve the phase modulation nonlinear and nonuniformity problem for better performance of LCoS-SLM as an easily programmable phase compensator. The LCoS-SLM could modulate the phase of incident light precisely to generate an accurate phase desired to achieve a virtual off-axis parabolic phase to generate light spots array. Finally, the 2 × 2 light spots array generated by the optical system was used to verify its potential in optical alignment.

Study on Aided Optical Alignment by Programmable Spots Array Generated by Off-Axis Parabolic Phase Based on LCoS-SLM