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A homodyne interferometer is one of the most important tools in nanometre measurements. However, its nonlinear error seriously affects measurement accuracy at the sub-nanometre level. As one of the dominant factors that cause nonlinear error in a homodyne interferometer with a quadrature detector system, the imperfection of polarizing beam splitters (PBSs) is investigated in this paper. The nonlinear error caused by the imperfection of PBSs in the detection part can be reduced by adjusting the gains of detectors. Nevertheless, eliminating the nonlinear error caused by the polarization mixing of the PBS in the interferometer part is difficult. In this paper, the nonlinear error caused by the polarization mixing of the PBS in the interferometer part is analyzed, and an optical compensation method is proposed to correct this polarization mixing. Theoretical calculation and simulation analysis show that this method can reduce the effect of inherent polarization mixing on nonlinear error significantly. In comparison with using only gain adjustment, the nonlinear error can be reduced by two orders of magnitude when the proposed method is applied. The nonlinear error can be decreased from approximately 4.5 nm to approximately 0.045 nm using the presented method based on the simulation results.

Compensation Method for Polarization Mixing in the Homodyne Interferometer