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A compact laser collimation system is presented for the simultaneous measurement of five-degree-of-freedom motion errors. The optical configuration of the proposed system is designed, and the principle of the measurement of five-degree-of-freedom errors is described in detail. The resolution of the roll and the horizontal straightness is doubled compared with other laser collimation methods. A common optical path compensation method is provided to detect light drift in real time and compensate for straightness and angle errors. An experimental setup is constructed, and a series of experiments are performed to verify the feasibility and stability of the system. Compared with commercial instruments, the pitch and yaw residuals are± 2.5   ″and± 3.5   ″without correction, and the residuals are± 1.9   ″and± 2.8   ″after correction, respectively. The comparison deviations of the horizontal straightness and vertical straightness changed from± 4.8   μ    m to± 2.8μm and± 5.9μm to± 3.6μm, respectively. The comparison deviation of the roll is± 4.3   ″. The experimental results show that the data of the five-degree-of-freedom measurement system obtained are largely the same as the measurement data of commercial instruments. The common optical path compensation can effectively improve the measurement accuracy of the system.

Compact Laser Collimation System for Simultaneous Measurement of Five-Degree-of-Freedom Motion Errors