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Haptic feedback is appealing for achieving the realistic perception of environmental changes for human bodies in human–computer interaction fields. However, existing haptic actuators have some hurdles such as single mode, poor compatibility, or incomplete tactile information. In this study, we proposed a novel way to generate haptic feedback by designing a soft electro-hydraulic pneumatic actuator (SEHPA) with dual drive modes. The SEHPA was structured with silicone films, a silicone air chamber, flexible electrodes, and an insulating liquid dielectric for good human–machine compatibility. The SEHPA had the advantages of high output force (1.5 N at 10 kPa) and displacement (4.5 mm at 5 kPa), as well as various haptic notifications (0~400 Hz vibration). The electro-hydraulic drive method realized smooth output force changes at the millinewton level (0~40 mN) and output displacement changes at the micron level (0~800 μm), which further enriched the details of the tactile experience. In addition, the self-sensing capability of the SEHPA can be dedicated to monitoring and ensuring precise output. The SEHPAs can be potentially mounted on the fingertips to provide accurate tactile sensation once the manipulator touches an object through teleoperation. More invisible information can also be obtained by customizing various haptic notifications. The excellent response behavior and accurate tactile haptic feedback demonstrate the candidate for teleoperation fields.

A Soft Electro-Hydraulic Pneumatic Actuator with Self-Sensing Capability toward Multi-Modal Haptic Feedback