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The piezoelectric (PE) fan is widely adopted in the field of microelectronics cooling due to its advantages of high reliability and good heat dissipation characteristics. However, PE fans driven by conventional circuits suffer from plenty of energy loss. To save energy, we propose an inductor-based charge recovery method and apply it to the driving circuit for the PE fan. Two inductor-based driving circuits, a single inductor-based driving (SID) circuit and a double inductor-based driving (DID) circuit are compared. The SID circuit has a simple structure and a slightly higher energy-saving rate, while the DID circuit introduces no additional oscillations and is more stable. The experimental results show that when the supply voltage changes, both circuits have a relatively stable energy-saving rate, which is about 30% for the SID circuit and 28% for the DID circuit. Moreover, the proposed circuits enjoy the same driving capacity as the conventional circuit, and the driven fan has the same cooling performance.

Design and Experimental Analysis of Charge Recovery for Piezoelectric Fan