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In this paper, a novel photovoltaic-electrostatic hybrid actuator with a slant lower electrode based on the PLZT ceramic is proposed. The mathematical model of photovoltaic-electrostatic hybrid actuator is established. Then, based on the mathematical model of photovoltaic-electrostatic hybrid actuator and the parameters identified, the mathematical simulation of the closed-loop displacement control for the photovoltaic-electrostatic hybrid actuator based on the PLZT ceramic is carried out. The results show that the displacement of the actuator can be controlled successfully at a particular value within the pull-in displacement by the light source. Furthermore, the response speed of the output displacement for photovoltaic-electrostatic hybrid actuator with a slant lower electrode is faster than that with a parallel lower electrode, offering a good potential to advance the current applications on micro-electro-mechanical system.

A Closed-Loop Control Mathematical Model for Photovoltaic-Electrostatic Hybrid Actuator with a Slant Lower Electrode Based on PLZT Ceramic