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(CoFeB)-(Si01.9) and CoFeB films were fabricated by synchronous triple RF magnetron sputtering with rotating a cylindrical electrode. Three types films for RF application in the range over 1 GHz were obtained, and these permeability characteristics and micro-structures were investigated.The as-deposited films exhibited large anisotropy field Hκ in the range from 40 to 550 Oe, and exhibited highferromagnetic resonance (FMR) frequencies of 1.6-6.0 GHz in permeability characterisrtics. The films exhibited amorphous like or hetero-amorphous structures, which led to good soft magnetic properties with electrical resistivity ρ of 100-100, 000 μΩcm and saturation magnetization 4πMs, of 6.5-20kG.It was found that the obtained larger Hκ was effective to attain the higher frequency characteristics with the lower losses for RF inductor cores.

Magnetic properties and frequency characteristics of (CoFeB)x-(Si01.9)i-x and CoFeB films for RF application