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Introduction A magnetic garnet film which consists of rare-earth elements, iron, bismuth(Bi), and gallium (Ga) is one of the most attractive magneto-optical recording materials used at the wavelength region shorter than 550nm. But, because the film texture of a garnet is crystalline, a film deposited on a glass substrate must be exposed to a high annealing temperature more than 500 C Authors minutely investigated and compared the crystallization process of Bi and Cia substituted dysprosium(Dy)-iron(Fe) garnet film on two types of glass substrates of which thermal expansion ratio show one order of difference to study the effect of film stress on a crystallization process of garnet film. The potentiality about improvement in a CN ratio of garnet disk by tuning film stress with a difference of thermal expansion ratio between a garnet and a glass substrate and/or an annealing temperature will be finally reported. Experimental A fi Im was deposited on a glass substrate by RF sputtering method and then annealed for I hour to crystallize a garnet film in an infrared image furnace. Quartz and non-alkaline(NA) glass were used as a substrate. A thermal expansion ratio of the former is 5x 1 07/C and that of the latter is 48x I 0 / . Three sintered targets which consists of Dy. Bi. Fe, Ga, and oxygen(O) were used. Compositional ratio of constituents except for 0 are listed in Tab.I. Annealed samples v/ere characterized with XRD and surface morphology was obsereved with a polarizing optical microscope. An infrared image furnace attached to optical microscope v,as also used for a real-time observation of crystallization process. From this result, the number of crystal nuclei. an incubation time, and a growth rate were decided. Results and discussion An optimum annealing temperature depends on a thermal expansion ratio of a substrate. Fig.l shows the dependence of upper and lower limits of an annealing temperature on a Bi compositional ratio to make a single phase and perfectly crystallized garnet film on a quartz and on an NA glass substrate. The lower limits on both substrates are almost in a same level and decrease Illonotonically with a Bi density. The upper limit is larger on an NA glass than on a quartz. Another notable feature of tile upper limits on both substrates is that the upper limits have the maximum at a Bi density of 33at.%. Rough textured and muddy films \vere sintered or a film had been partially peeled otT in the extreme case at a temperature above the upper limit in the region

THE EFFECT OF FILM STRESS ON SURFACE MORPHOLOGY AND CN RATIO OF A GARNET FILM