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Thickness dependence for uniaxial magnetic anisotropy energy Ku and the SiN under-layer sputter-etching effect on GdTbFeCo thin films were measured using FMR. The uniaxial magnetic anisotropy decreased with decreasing GdTbFeCo layer thickness. Under-layer sputter-etching leveled the SiN surface and increased the uniaxial magnetic anisotropy for GdTbFeCo film.

FMR STUDY ON UNDER-LAYER SPUTTER-ETCHING EFFECT FOR GdTbFeCo THIN FILMS