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Stepan Gzhytskyi National University of Veterinary Medicine and Biotechnologies Lviv, ekarska Str., 50, Lviv, 79010, Ukraine. Tel.: +38-032-239-26-35 E-mail: tsizhb@ukr.net Tsizh, B., & Dziamski, Z. (2020). Technological Methods of Forming Thin Semiconductor Layers. Part 3. Сathode Sputtering. Scientific Messenger of Lviv National University of Veterinary Medicine and Biotechnologies. Series: Food Technologies, 22(93), 15–17. doi: 10.32718/nvlvetf9303

naukovij vìsnik lʹvìvsʹkogo nacìonalʹnogo unìversitetu veterinarnoï medicini ta bìotehnologìj ìmenì s.z. g̀žicʹkogo. serìâ harčovì tehnologìï/naukovij vìsnik lʹvìvsʹkogo nacìonalʹnogo unìversitetu veterinarnoï medicini ta bìotehnologìj ìmenì s.z. gžicʹkogo. serìâ: harčovì tehnologìï

Technological Methods of Forming Thin Semiconductor Layers Part 3. Сathode Sputtering