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Fabrication and development of TiB2-based nanostructured coatings and the development of finite element (FE) models to simulate the nanoindentation and micro-scratch test processes in various coating systems were investigated in the present work. By varying the sputter-target power density, substrate temperature, deposition time, substrate-totarget distance, substrate rotation, substrate biasing and substrate sputter cleaning, the relationship between the sputtered structure properties and sputtering conditions were established. In order to increase the coating/substrate adhesion, interlayer and multilayer techniques between TiB2 and tough material, e.g. Ti and Cr were proposed and employed. Furthermore, techniques to strengthen the sputtered interlayer such as Ti by annealing the resultant coatings at various temperatures and introducing nitrogen gas during interlayer deposition were carried out. The experimental results showed that the target-to-substrate distance played a major role in the coating structure and properties. Sputter cleaning of substrate helped to improve TiB2 coating hardness and adhesion. The deposition process could be controlled to produce a TiB2 coating with both high hardness and good adhesion strength. This was achieved by introducing substrate sputter-cleaning and then biasing for the early stage of deposition, followed by deposition without biasing. Annealing at optimum temperature helped to promote the (001) orientation of the TiB2 coating and improved its hardness, coating adhesion and elastic recovery ability. Substrate rotation was focused to have a significant effect on the structure, orientation, hardness and adhesion strength of sputtered TiB2 coatings. Significant enhancement of the adhesion for the TiB2 coatingHSS substrate was found by optimum doping nitrogen into the Ti interlayer, the use of multilayer and the use of Cr interlayer. During dry sliding wear against an alumina ball, failure of the coating was correlated with the hardness and adhesion of the coatingsubstrate system. With increasing coating hardness and coating-substrate adhesion the wear resistance was increased. 1 ATTENTION: The Singapore Copyright Act applies to the use of this document. Nanyang Technological University Library

Fabrication, characterisation and property modelling of TiB2 based nanostructured coatings