INFLUENCE OF PARAMETERS OF ION FLOW ON THE STRUCTURE AND PROPERTIES OF COATINGS OF Α-ALUMINUM OXIDE OBTAINED IN THE ARC DISCHARGE ANODE REACTIVE EVAPORATION ION C SUPPORT | Zendy

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INFLUENCE OF PARAMETERS OF ION FLOW ON THE STRUCTURE AND PROPERTIES OF COATINGS OF Α-ALUMINUM OXIDE OBTAINED IN THE ARC DISCHARGE ANODE REACTIVE EVAPORATION ION C SUPPORT

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