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We measure the quality factor (Q) due to gas damping, thermoelastic dissipation (TED), and anchor damping of a ring resonator operating in the wineglass mode. We analyze the Q over a range of temperatures and pressures and compare anchor damping of two different anchor designs. This method provides a path towards better understanding of anchor damping in MEMS. INTRODUCTION MEMS resonators lose energy due to gas damping, thermoelastic damping, anchor damping, and the Akhiezer effect. The effect of these damping mechanisms on the performance of MEMS resonators is expressed by the quality factor (Q), which determines fundamental noise in MEMS devices [1, 2]. The total Q can be calculated as the reciprocal sum of each damping mechanism:

DIRECT MEASUREMENTS OF ANCHOR DAMPING IN PRESSURE-LIMITED RING RESONATORS