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We report, for the first time, a fabrication process for building highly smooth, symmetric 3-D dynamic wineglass structures using low internal loss materials, namely fused quartz and ultra low expansion titania silicate glass (ULE TSG). The approach consists of a high temperature (at 1650 °C) micro-glassblowing process and a novel inverted-wineglass architecture that provides self-aligned stem structures. An in-house process capability of 1800 °C glassblowing with a rapid cooling rate of 500 °C/min was developed. Feasibility of the process has been demonstrated by fabrication of TSG wineglass micro-structures. The method may enable new classes of TSG and fused quartz MEMS devices with extremely low surface roughness, 0.23 nm surface average (Sa), intrinsically low internal losses (QTED > 5E+10) and dynamically balanced structures.

TITANIA SILICATE / FUSED QUARTZ GLASSBLOWING FOR 3-D FABRICATION OF LOW INTERNAL LOSS WINEGLASS MICRO-STRUCTURES