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A microfabricated normally-closed microvalve consisting of a flat silicon spring, a co-sputtered and patterned TitaniumNickel (TiNi) shape memory alloy (SMA) actuator, and an orifice die, is presented. All three components are batch microfabricated using silicon substrates. This microvalve is designed for an actuation mechanism for a pneumatically controlled, biologically inspired six-legged microrobot. We have used a TiNi SMA thin film as an actuator since it is capable of both high strains (3%) and high forces (work density of 5 x lo7 Urn”). Flow rates of up to 0.17 lpm are achieved when the input air pressure is 34.5 kPa (5.0 psi). A CNC-machined plastic package accommodates the electrical and fluidic interconnects.

Fully Microfabricated, Silicon Spring Biased, Shape Memory Actuated Microvalve