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We have developed a new chemical sensor array by combining polymer-based chemiresistors with a standard integrated circuit technology. We fabricated an array of addressable chemical sensor sites in a CMOS process, and then performed a post-processing step of electroless gold to create sensor contacts. We create sensors by spraying a mixture of nonconductive polymers and carbon black particles onto the sensor sites. We demonstrate that an array of diverse chemical sensors can perform discrimination of odors.

An Integrated Chemical Sensor Array using Carbon Black Polymers and a Standard CMOS Process