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In order to guarantee the accuracy of nanoindentation instruments it is necessary to carry out a series of rather time-consuming and costly direct calibrations. Reference materials with known mechanical properties can be used alternatively for most of these calibrations. Compared with the direct calibration methods, reference materials excel by their lower costs and easy operation. Of high importance is the determination of the indenter tip geometry and the instrument’s compliance with suitable reference materials.

Investigation of the properties of candidate reference materials suited for the calibration of nanoindentation instruments