English (United Kingdom)

https://curated-unify.zendy.io/wp-json/zendy-region/v1/featured_content/oa?rat=en

https://curated-unify.zendy.io/wp-json/zendy-region/v1/highlighted_journal/

Global: Zendy Plus annual

Presents the access of premium content as premium feature

Premium Content

Presents the keyphrase highlighting as premium feature

Keyphrase Highlighting

Presents the summarisation as premium feature

Summarisation

Insights

Presents the pdf analysis as premium feature

PDF Analysis

Presents the zaia usage as premium feature

ZAIA

Global: Zendy Tools annual

Global: Zendy Free Plan

Global: Zendy Tools monthly

Global: Zendy Plus monthly

Mechanical properties of amorphous and crystalline Ta-silicide thin films were studied in cyclic depth-sensing nanoindentation experiments. At the first loading cycle (up to peak load  P  1 ) an initial indent of  h  0  in depth was formed. Then without shifting, the indenter was reloaded to a higher load of  P  2 . Up to  P  1 , the elastic loading of the initial indents took place. When the repeated load exceeded  P  1 , the plastic deformation of the initial indent began. Using the initial indent reloading data, the deformation curves of Ta-silicide thin films at point loading have been found. Such deformation curves do not depend on the depth of the initial indent and characterize the mechanical behavior of materials under point loading. Crystallization of amorphous phase during annealing caused an appreciable change of the Ta-silicide thin film deformation curve. Both elastic and plastic properties of Ta-silicide improved due to transition from amorphous to crystalline state.

Deformation Curves of Ta-Silicide Thin Films Obtained in Cyclic Nanoindentation Experiments