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Phase equilibria were studied in the Mo–Ga–N system at 800 °C in order to better understand the metallurgy of Mo contacts to the wide band gap semiconductor GaN. Liquid Ga metal and the solid phases Mo 8 Ga 41 , Mo 3 Ga, and β-Mo 2 N were experimentally observed to be in thermodynamic equilibrium with GaN. Equilibrium between γ-Mo 2 N and GaN can also be inferred. No ternary phases were found in any of the samples examined in this study.

Condensed Phase Equilibria in the Mo-Ga-N System at 800 °C