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Laser Interference Metallurgy is a newly developed method which permits the creation of periodic patterns with a well defined long-range order on metallic surfaces. By means of interfering laser beams with sufficient high pulse power a direct structuring on the scale of microns with well known metallurgical effects such as melting, recrystallization, quenching, recovery, defect or phase formation can be obtained. In this work Energy Dispersive X-ray Spectroscopy is used to study the constitutive elements of the films at different irradiated zones. The obtained scans are compared with cross-sectional analyses by Focused Ion Beam giving important information for the interpretation of the layer structure.

Analysis of Periodical Structures Produced by Laser Interference Structuring Using Energy Dispersive X-ray Spectrometry