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Probing mechanical properties in the micrometer regime is of current interest in materials science. A focused ion beam microscope was employed to fabricate miniaturized specimens, while an indenter installed in a scanning electron microscope was utilized to actuate the samples and record the load and displacement data during the deformation. Examples for miniaturized compression, tension, bending, as well as newly developed bending fatigue and bending fracture experiments are presented, demonstrating the unique flexibility of in-situ mechanical testing in the scanning electron microscope at small length scales.

Overview on established and novel FIB based miniaturized mechanical testing using in-situ SEM