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The determination of mechanical properties of thin films is of crucial interest for applications of protective layers. Nanoindentation and nanoscratch experiments of diamond-like carbon coated (100) silicon surfaces under ambient conditions have been performed with a conical indenter on a Hysitron system, mounted on an atomic force microscope system. Single layers and multilayers with hard soft stacking were tested as well. Microhardness, friction and wear behaviour were determined with multi-indentations, single scratches and oscillating multicycles scratch. The indentation experiments revealed that critical force plastic deformation takes place. The oscillating multicycles scratch experiments determined the high wear resistance of the diamond-like carbon coatings. Multilayer systems were compared with single layer coatings.

international journal of materials research

Analysis of nanoindentation and nanoscratch experiments of thin amorphous carbon coatings and multilayers: friction, wear and elastic – plastic deformation