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Super-high angular speed polishing of diamond films is a new polishing method. During the polishing process, the rotational velocity of the cast iron polishing plate is higher than that of conventional polishing methods, and friction between the polishing plate and the diamond film during rotary motion generates heat that creates a diffusion condition for carbon atoms. The temperature and strain energy density distributions of the polished surface directly affect the polishing quality of diamond films. In this paper, a three-dimensional thermo-mechanical coupled finite element analysis was employed to analyze the temperature and strain energy due to the friction between the polishing plate and the thick diamond film while the polishing plate rotates at super-high angular speed. The results indicate that when the diamond film and polishing plate rotate in the same direction, the differences of temperature and strain energy evidently decrease, and the temperature and strain energy in the diamond film become more uniform. The removal rate by super-high speed polishing has been quantitatively described by the diffusion mechanism, and it agrees well with the experiment data. This work will provide theoretical guidance to the design and operation of the super-high speed polishing of diamond films.

The coupled FEM analysis of super-high angular speed polishing of diamond films