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The development of micro-electro-mechanical systems (MEMS) is a subject of intense research due to the significant impact of miniaturization. The assembly of micro-devices involves handling of parts that are extremely small. A micro-gripper compliant mechanism is one of the key elements in micro-robotics as well as micro-assembly technologies for handling and manipulating micro-objects without damage. Topology optimization has proven to be a power- ful method for the conceptual design of structures and mechanisms. This paper presents topology optimization of three-dimensional micro-gripper compliant mechanism with straight-line path and with parallel movement gripping arms. A three-dimensional finite element analysis model using ANSYS is constructed for the propose design domain. The optimal configuration micro-grippers, which can realize a straight-line path and parallel movement of the gripping arms, are demonstrated.

Three-Dimensional Optimal Material Distributions for Micro-Gripper with Straight-Line Path and Parallel Movement Arms