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High-sensitive visualization of the local electric and magnetic ˆeld is possible using a low energy electron beam combining with a simple grid detector conˆguration. The beam de‰ection goes along with the clear principle that the larger de‰ection can be induced by lower energy electron based on the Rutherford scattering scheme. The ˆeld distribution around two-dimensional materials allows quantitative analysis of the local ˆeld, showing good agreements with FEM simulation. Well deˆned beam scanning control established in the recent scanning electron microscope (SEM) can project the detector grid image superimposed on the specimen image. And thus the localized ˆeld distribution was easily visualized through a simple E-ˆled vector translation based on the de‰ection conˆguration. Detailed techniques and the analysis were described from the viewpoint of practical applications.

Visualization of Localized Field Using Deflection of Low-Energy Electron Beam with SEM/STEM