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Using single-crystal sapphire as the sensor material, we have developed the Sapphire Capacitance Diaphragm Gauge, which is highprecision, highly-reliable, and intended to be used mainly in semiconductor manufacturing processes. Single-crystal sapphire possesses extremely high corrosion resistance and heat resistance, and also possesses excellent mechanical characteristics. The gauge provides high precision even in harsh environments such as corrosive atmospheres or high temperatures, allowing us to succeed in realizing a long-term stable vacuum measurement. We have also developed high-precision measurement with high linearity and high tolerance for temperature changes, by means of signal processing using microprocessor based control.

Development of Sapphire Based Capacitance Vacuum Gauge and Feature of Product