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Comparison of Pressure Dependence between the Frequency Change and the Impedance Change of a Quartz Crystal Oscillator Vibrating in the ViscousFlowing Gas Akira KUROKAWA1, Hisao HOJO2 and Takichi KOBAYASHI3 1National Institute of Advanced Industrial Science and Technology (AIST), 111 Umezono, Tsukuba 3058568, Japan 2Vacuum Products Co., 162 Miyuki, Kodaira, Tokyo 1870012, Japan 3Vacuum Products Instruments Co., Ltd., 67 Kodachi, Fujikawaguchiko, Yamanashi 4010302, Japan

journal of the vacuum society of japan

Comparison of Pressure Dependence between the Frequency Change and the Impedance Change of a Quartz Crystal Oscillator Vibrating in the Viscous-Flowing Gas