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Quartz sensor (Q-sensor) measurement, which can detect the change in gas composition in plasmas, was investigated with varying bias voltage near the sensor. It was found that the change in the Q-sensor output by hydrogen (H2) plasmas depends on bias voltages. In addition, their bias voltage dependences were similar to those by Langmuir probe measurement. Judging from the comparison to the results by Langmuir probe measurement, the Q-sensor output change measured at positive and negative bias voltages correlated to current to the Q-sensor bias electrode and positive ion density in H2 plasmas, respectively. Above results indicated that Q-sensor measurement can obtain information on ion and electrons in H2 plasmas with varying bias voltages near the Q-sensor.

Bias Voltage Dependences of Quartz Sensor Measurements for Plasmas