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Polymer thin ˆlms were prepared by RF sputtering with argon (Ar) and tetra-‰uorocarbon (CF4) gases. Four ‰uorocarbon polymers, poly(tetra ‰uoro ethylene) (PTFE), tetra ‰uoro ethylene-per‰uoro alkylvinyl ether copolymer (PFA), ‰uorinated ethylene propylene copolymer (FEP), poly(vinylidene di ‰uoride) (PVDF) were used as the sputtering targets. Molecular structures of sputtered ‰uorocarbon thin ˆlms were analyzed with x-rays photoelectron spectroscopy (XPS) and fourier transform infrared spectroscopy (FTIR). Wettability of these polymer thin ˆlms was estimated with contact angles of water droplets. The contact angles increased with increase of the F/C ratio (‰uorine for carbon) of the thin ˆlm. PTFE target prepared by a spin coat method was also used for the sputtering target, and analyzed the elemental compositions of the target after the sputtering. The F/C ratio of the polymer thin ˆlm prepared by the sputtering with CF4 was almost the same value as that of the thin ˆlm with Ar. However, the C/F ratio of the target after the CF4 sputtering was much higher than that after the Ar sputtering.

Characterization of Polymer Thin Films Prepared with RF Sputtering with Fluorocarbon Polymer Targets