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It is well known that TiO2 film and TiN film as an optical filter have the characteristics cutting an ultraviolet ray and an infrared ray, respectively. These filters begin to be used as a window glass for cars or buildings, because a harmful ultraviolet ray for the human body or an infrared ray leading to increase of a temperature in buildings can be avoided by these filters.In this study, three kinds of films based on TiO2 and TiN were prepared by a reactive sputtering method. These films are a mixed film (Ti-O-N), multilayer films (TiN/TiO2 and TiO2/TiN) and graded films (TiN-TiO2 and TiO2 TiN). The optical properties about an ultraviolet ray, visible ray and infrared ray were measured by a spectroscope.A cut off rate of the multilayer film exhibited the highest value in an ultraviolet ray and an infrared ray. However transmittance of a visible ray decreased by influence of a boundary between TiO2 and TiN film. Therefore a visible ray transmittance of the graded film without a boundary rose in comparison with that of the multilayer film.

Influence of Constitution for the Optical Properties of TiO2-TiN Compound Films