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Dynamical behaviors of hydrogen molecules from titanium oxides on a titanium surface were examined with thermal desorption spectroscopy (TDS). The oxide film on a titanium surface has been formed in an oxygen gas with a pressure of 1 × 10-4 Pa at a temperature of 400°C. The specimen was exposed in a hydrogen gas at a pressure of 1 × 104 Pa after the oxidation. The TD spectra of hydrogen from the titanium oxide surface have shown three peaks.

Dynamical Estimation of Titanium Oxide Film with Molecular Hydrogen in Thermal Desorption Spectra.