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Vacuum breakdown characteristics of oxygen-free copper electrodes processed by precision machining were investigated by applying impulse voltage. Before breakdown measurements, He ion-beam sputtering was performed to the electrode surface. Chemical compositions on the electrode surface before and after the ion-beam sputtering and after the 500 times repetitive breakdowns were analyzed by X-ray Photoelectron Spectroscopy (XPS). In addition we investigated the vacuum breakdown characteristics of oxygen-free copper electrodes that ware processed by precision machining and heated in the hydrogen firing. As a result, processed electrodes by precision machining showed higher breakdown fields than those for electrodes without the process. And their conditioning saturated rapidly. The results of the XPS spectra confirmed that organic contaminants due to C were removed by repetitive breakdowns. The hydrogen firing improved breakdown fields of the early stage of conditioning process.

Vacuum Electrical Breakdown Characteristics of Oxygen Free Copper Electrodes Processed by Precision Machining.