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The mechanical screw-grooved vacuum pump is known to have a higher evacuation performance for a gas of heavier molecules than that of lighter molecules. In this research, it is newly found that when this type of pump is used to evacuate a mixed gas the inhalation pressure of the gas can be reduced by leaking a gas of heavier molecules within a given volume flow rate. For H2-N2 and He-Ar mixtures, relations of the inhalation pressure with flow rate of a heavier gas at several given evacuation flow rates of a lighter gas are clarified experimentally by changing the back pressure and the rotation speed of rotor of the pump. It is also shown that the specific evacuation characteristics can be explained theoretically by a smoothed pressure flow model applying the combined equation of flow and diffusion of a rarefied gas mixture.

Evacuation Characteristics of a Binary Gas Mixture by a Mechanical Screw-Grooved Vacuum Pump.