Targets for High Rate Reactive Sputtering. Propose of Reactive Sputtering using Solid Oxygen Source for Low-Temperature and High Deposition Rate Fabrication of Pb(Zr,Ti)O3 Thin Film. | Zendy

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Targets for High Rate Reactive Sputtering. Propose of Reactive Sputtering using Solid Oxygen Source for Low-Temperature and High Deposition Rate Fabrication of Pb(Zr,Ti)O3 Thin Film.

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