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The electron energy distribution function, F (E) , in ECR-CH4 plasma was measured with the Langmuir probe technique. Increase in microwave power expanded tail of F (E) in the high energy region; the electron density of the high energy region (E> 20 eV) in methane plasma increased non-linearly against the power in the range between 100 W and 400 W. Peak intensities of Hα, Hβ, and CH* determined from optical emission spectra (370-670 nm) also increased non-linearly with microwave power. The behavior can be explained by contribution of high-energy tail of F (E) to the electron impact dissociation of CH3 radicals.

Measurement of ECR-CH4 Plasma using Langmuir Probe and an Optical Emission Spectroscopy.