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The quantitative measurement of partial pressure using a quadrupole mass spectrometer (QMS) is disturbed by the effect of ESD (electron stimulated desorption) ions desorbed from the grid surface of the ionizer. On the other hand, effect of vacuum ultra violet (VUV) photons generated in the ionization process of gasses determines the lower detection limit of the very small amount of impurities in the process gas. To eliminate these effects, we have developed the QMS with a Bessel-Box type energy filter which in placed between the ionizer and the quadrapole mass assembly. The features of the new QMS are as follows : (1) The gas phase ions generated in the ionizer can only be detected. (2) The background signal is suppressed to the level where the minimum detectable impurity in the process gas is less than 10 ppb. From these features, it is expected that the new QMS is also available for the partial pressure measurement in the systems containing high energy particles and photons, such as storage ring systems.

Quadrupole Mass Spectrometer with Bessel-Box Type Energy Filter.